Provided is a gas laser electrode in which a stable laser output can be
obtained by inhibiting the deterioration of the electrode (discharge characteristics).
In an anode 3, a dielectric material 4 is applied on the surface
of a discharging portion 3a in order to inhibit the deterioration
of the electrode. Used as a dielectric material 4 may be, for example, fluorides
such as calcium fluoride and strontium fluoride. Further, the dielectric material
4 is of a thickness (in a range of 0.005 mm1.5 mm, preferably 0.1
mm1 mm, for example) sufficient to prevent the erosion of halogen gas in
the discharging portion 3a of the anode 3 and to secure a
conductivity thereof, whereby it is enabled to form mono-fluoride evenly in extreme precision.