Systems and methods for optical inspection of patterned and non-patterned objects. The methods include determining a state of polarization of light reflected from the object, establishing a polarization state of the incident light, and filtering the reflected light by polarization so as to provide an optical signal that is detected by a detector.

 
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< Concurrent measurement and cleaning of thin films on silicon-on-insulator (SOI)

< Dermoscopy epiluminescence device employing cross and parallel polarization

> Means for illuminating a measurement surface and device and method for determining the visual properties of objects

> Optical architectures for microvolume laser-scanning cytometers

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