Tapered elements fabricated from a substrate of a size many times that of
a single element are disclosed. Such tapered elements may be used as piezoelectric
microactuators such as in-plane piezoelectric bimorph microactuators. A unique
method of fabricating such tapered elements is provided. According to the method,
cutting directions are first defined, the substrate is then cut a plurality of
times in each cutting direction with adjacent cuts in each cutting direction indexed
by proper indexing distances which are determined based on the dimensions of the
final tapered elements. In one embodiment of the method, a plurality of optically
detectable marks are used to define the cutting directions and cutting means is
accordingly optically aligned with the cutting directions.