Methods, systems, and apparatuses provide dynamic creation and modification
of wafer test maps. Test plans are defined for a testing session of a wafer lot.
The test plan is associated with a number of seed map patterns. During a wafer
lot testing session, test results are dynamically obtained and examined at run-time
of a test. Moreover, the seed map patterns are overlaid on the test sites defined
in the test plan. If the test result statistics are outside of defined threshold
tolerance levels, then a new wafer test map is created or modified at run-time,
according to corresponding seed map patterns. If seed map patterns are within the
intersection of valid test sites, then seed map patterns are created at run-time.