The present invention provides a vertical memory device formed in a silicon-on-insulator
substrate, where a bitline contacting the upper surface of the silicon-on-insulator
substrate is electrically connected to the vertical memory device through an upper
strap diffusion region formed through a buried oxide layer. The upper strap diffusion
region is formed by laterally etching a portion of the buried oxide region to produce
a divot, in which doped polysilicon is deposited. The upper strap region diffusion
region also provides the source for the vertical transistor of the vertical memory
device. The vertical memory device may also be integrated with a support region
having logic devices formed atop the silicon-on-insulator substrate.