An integrated type optical coupling device capable of easily accurately performing
an optical arrangement between a narrow-pitch multi-channel optical waveguide and
an optical fiber array and a master used in fabricating the same are provided.
By forming a fixing projection between the optical fibers, the dynamic stability
of the optical fiber array is increased and the optical arrangement between the
optical waveguide and the optical fiber is easily accurately performed by hand.
Accordingly, the cost required for the alignment is reduced and the alignment error
due to the rolling of the optical fiber is not generated. In addition, the multi-step
metal master is fabricated by using a photoresist film for X-ray exposure, and
the narrow-pitch multi-channel optical coupling device is fabricated in a hot embossing
method using the same, thereby the high-integrated device can be fabricated at
a low price.