Disclosed herein is a nitride semiconductor light emitting device. The
nitride semiconductor light emitting device comprises an n-type nitride semiconductor
layer on a substrate, an active layer formed on the n-type nitride semiconductor
layer so that a portion of the n-type nitride semiconductor layer is exposed, a
p-type nitride semiconductor layer formed on the active layer, a high-concentration
dopant area on the p-type nitride semiconductor layer, a counter doping area on
the high-concentration dopant areas, an n-side electrode formed on an exposed portion
of the n-type nitride semiconductor layer, and a p-side electrode formed on the
counter doping area. A satisfactory ohmic contact for the p-side electrode is provided
by an ion implantation process and heat treatment.