An active type tunable wavelength optical filter having a Fabry-Perot structure
is disclosed. A tunable wavelength optical filter which comprises a lower mirror
in which silicon films and oxide films are sequentially laminated in a multi-layer
and the silicon film is laminated on the highest portion; an upper mirror in which
silicon films and oxide films are sequentially laminated in a multi-layer and the
silicon film is laminated on the highest portion and which is spaced away from
the lower mirror by a predetermined distance; a connecting means for connecting
and supporting the lower mirror and the upper mirror to a semiconductor substrate;
and electrode pads for controlling the gap between the lower mirror and the upper
mirror by an electrostatic force and the method of manufacturing the same are provided.
Thereby, by finely driving the upper and lower mirrors composed of a multi-layer
structure of the silicon film and the oxide film by the electrostatic force, the
wavelength of the transmitted light with respect to the incident light can be selectively sent.