There is disclosed a fluorine-containing polymerizable cyclic olefin compound
that has one or more partial structures represented by the following general formula
(1) or (2). There can be provided a novel fluorine-containing polymerizable cyclic
olefin compound which is excellent in transparency to irradiation, for example,
at a wavelength of 200 nm or less, especially at a wavelength of 160 nm or less
and dry etching resistance, has low hydrophobicity, and is excellent in development
characteristics, and thus is useful as a raw material for a base resin of photoresist
composition
##STR1##