Disclosed is a nozzle for injecting sublimable solid particles, which is
capable of minimizing consumption of the carrier gas and also maximizing cleaning
efficiency. The nozzle comprises a base block having a space in which carrier gas
is supplied through a gas supplying pipe; a sub-block having a space in which cleaning
medium decompressed by a regulator is supplied through a cleaning medium supplying
pipe; a first venturi block having a venturi path for adiabatically expanding the
carrier gas supplied from the space of the base block, and a cleaning medium injection
path communicating the venturi path and the space of the sub-block and the carrier
gas passed through the venturi path; and a second venturi block having a venturi
path for adiabatically expanding the mixed gas of the carrier gas and the cleaning medium.