The presence or absence and the intensity of refractive index distribution are
easily controlled with high reproducibility without depending on the fabricating
process accuracy. InGaAs well layers (14a) and (14b),
which have a narrow bandgap and a high refractive index, are enclosed by a lower
barrier layer (13), an intermediate barrier layer (15), an upper
barrier layer (16) and a buried layer (18) of GaAsN-based materials
of a wide bandgap. Then, by adjusting the nitrogen crystal mixture ratio of the
GaAsN-based materials that constitute the barrier layers (13), (15)
and (16) and the buried layer (18), the presence or absence and the
intensity of the refractive index distribution are controlled. Thus, the refractive
index distribution is easily controlled with high reproducibility without considering
the configuration of a diffraction grating (17), a refractive index balance
with respect to the buried layer (18) and so on, i.e., without depending
on the fabricating process accuracy.