Process for producing photoresist polymeric compound having repeated units
corresponding to at least one monomer selected from monomer (a) having lactone
skeleton, monomer (b) having group which becomes soluble in alkali by elimination
with acid, and monomer (c) having alicyclic skeleton having hydroxyl group. Process
includes (A) polymerizing mixture of monomers containing at least one monomer selected
from the above monomers (a), (b), and (c), and (B) extracting polymer formed in
the polymerization by using organic solvent and water to partition the formed polymer
into organic solvent layer and metal component impurity into aqueous layer, or
passing polymer solution, which contains polymer having repeated units corresponding
to at least one of the above monomers (a), (b), and (c) and metal content of which
is 1000 ppb by weight or less relative to the polymer through filter comprising
porous polyolefin membrane having cation-exchange group. The photoresist polymeric
compounds have a metallic impurity content that is extremely low.