A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth,
stationary comb teeth, distributed serpentine springs, and anchors. The scanning
mirror and the rotational comb teeth are driven by electrostatic force from stationary
in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb
structure by multiple support attachments. Multiple serpentine springs serve as
the flexible hinges that link the movable structure to the stationary support structure.