Multiple metallization layers in a partially fabricated integrated circuit
are formed in a single process step. As a place-holder for the later-deposited
metallization layers, sacrificial material is deposited in the integrated circuit
at desired locations at various fabrication levels over a substrate. The sacrificial
material is then removed to form a contiguous open volume spanning multiple fabrication
levels. A conductor is then deposited in the open volume to form multiple metallization
layers in a single step.