An apparatus for forming a nano grating device to film nano-scale interference
fringes by holography in order to makes a nano-scale meshed structure is disclosed.
A beam emitted form a light source passes subsequently through a beam splitter
and two reflectors to reach at symmetrically mounted light emitting modules. The
light emitting modules generate two beams passing along the same optical paths
and then projecting on a photosensitive substrate that is attached on a hemi-sphere
lens. Thus, a first set of interference fringes are formed. Then, the substrate
rotates with an angle and then is subjected to exposure to form a second set of
interference fringes crossing the first set of interference fringes. Thereby, a
nano-scale meshed structure is obtained.