There is disclosed a substrate treating method comprising supplying a treating
solution onto a substrate, and continuously discharging a first cleaning solution
to the substrate from a first discharge region disposed in a nozzle, while moving
the nozzle and substrate with respect to each other in one direction, wherein a
length of a direction crossing at right angles to the direction of the first discharge
region is equal to or more than a maximum diameter or longest side of the substrate,
the nozzle continuously spouts a first gas to the substrate from a first jet region,
and the length of a direction crossing at right angles to the direction of the
first jet region is equal to or more than the maximum diameter or longest side
of the substrate.