A positive photoresist composition comprising:
- (A) an oxime sulfonate compound represented by the specific formula,
- (B) a resin comprising repeating units including a group represented
by the specific formula and which increases the solubility in an alkaline developing
solution by the action of an acid, and
- (C) a fluoroaliphatic-group-containing polymeric compound containing
repeating units derived from a monomer represented by the specific formula.
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