An inspection system for detecting anomalies on a substrate. A first network
is
coupled to a sensor array and communicates image data. Process nodes are coupled
to the first network, and processes the data to produce reports. Each process node
has an interface card that formats the data for a high speed interface bus that
is coupled to the interface card. A computer receives and processes the data to
produce the anomaly report. A second network receives the anomaly reports from
the process nodes. A job manager is coupled to the second network, and receives
the anomaly reports from the process nodes and sends information to the process
nodes to coordinate the processing of the data in the process nodes.