A technique and apparatus is disclosed for the optical monitoring and measurement
of a thin film (or small region on a surface) undergoing thickness and other changes
while it is rotating. An optical signal is routed from the monitored area through
the axis of rotation and decoupled from the monitored rotating area. The signal
can then be analyzed to determine an endpoint to the planarization process. The
invention utilizes interferometric and spectrophotometric optical measurement techniques
for the in situ, real-time endpoint control of chemical-mechanical polishing planarization
in the fabrication of semiconductor or various optical devices. The apparatus utilizes
a bifurcated fiber optic cable to monitor changes on the surface of the thin film.