A deliberately engineered placement and size constraint (molecular weight
distribution) of photoacid generators, solubility switches,
photoimageable species, and quenchers forms individual pixels within a
photoresist. Upon irradiation, a self-contained reaction occurs within
each of the individual pixels that were irradiated to pattern the
photoresist. These pixels may take on a variety of forms including a
polymer chain, a bulky cluster, a micelle, or a micelle formed of several
polymer chains. Furthermore, these pixels may be designed to
self-assemble onto the substrate on which the photoresist is applied.