A SRAM of complete CMOS type having its memory cell composed of six MISFETs,
in
which a pair of local wiring lines for connecting the input/output terminals of
CMOS inverters are formed of a refractory metal silicide layer formed over a first
conducting layer constituting the individual gate electrodes of the drive MISFETs,
the transfer MISFETs and the load MISFETs of the memory cell and in which a reference
voltage line formed over the local wiring lines is arranged to be superposed over
the local wiring lines to form a capacity element.
Moreover, the capacity element is formed between the local wiring lines
and the first conducting layer by superposing the local wiring lines over the first
conducting layer.
Moreover, the local wiring lines are formed by using resistance lowering
means such as silicification. In addition, there are made common the means for
lowering the resistance of the gate electrode of the transfer MISFETs and the means
for forming the local wiring lines.