An AlN buffer layer 2; a silicon (Si)-doped GaN high-carrier-concentration
n+ layer 3; an Si-doped n-type Al0.07Ga0.93N
n-cladding layer 4; an Si-doped n-type GaN n-guide layer 5; an active
layer 6 having a multiple quantum well (MQW) structure, and including a
Ga0.9In0.1N well layer 61 (thickness: about 2 nm)
and a Ga0.97In0.03N barrier layer 62 (thickness: about
4 nm), the layers 61 and 62 being laminated alternately; an Mg-doped
GaN p-guide layer 7; an Mg-doped Al0.07Ga0.93N p-cladding
layer 8; and an Mg-doped GaN p-contact layer 9 are successively formed
on a sapphire substrate. A p-electrode 10 is formed of a film of titanium
nitride (TiN) or tantalum nitride (TaN) (thickness: 50 nm). The contact resistance
of this electrode is reduced through heat treatment.