An axial direction excitation type F₂ laser apparatus comprises a discharge tube consisting of an insulating cylinder and metal electrodes at both ends of thereof, and a reflecting mirror or a transmitting mirror, constituting a resonator, outside the electrodes. A high voltage for pulse discharge is applied to the electrodes from a drive circuit. Total gas pressure in the discharge tube is set in a range between 10 Torr. and 100 Torr., and concentration of F₂ gas to total gas in the discharge tube is set to be in a range between 0.2% and 2.0%. This low-pressure axial direction excitation type F₂ laser apparatus having small size and high efficiency can be provided at a low cost.