A lithographic apparatus includes an illumination system configured to
condition a radiation beam; a support configured to support a patterning
device, the patterning device being capable of imparting the radiation
beam with a pattern in its cross-section to form a patterned radiation
beam; a substrate table configured to hold a substrate; a projection
system configured to project the patterned radiation beam onto a target
portion of the substrate; and a robot configured to transfer an
exchangeable object to and from a support region, the robot including an
arm and an end effector, the end effector including a first and second
carrier configured to carry respective exchangeable objects, and the end
effector being rotatably connected to the arm of the robot around a
rotation axis which extends substantially parallel to the support region.