The present invention provides novel alicyclic-esterified norbornene carboxylates
monomers, polymers and photoresist compositions that comprise the polymers as a
resin binder component. Methods for synthesis of the monomers and polymers of the
invention are also provided. The photoresist compositions of the invention can
provide highly resolved relief images upon exposure to short wavelengths, including
sub-300 and sub-200 nm wavelengths such as 193 nm and 157 nm.