A flip-chip LED device (10) includes a plurality of group III-nitride
semiconductor
layers (22) defining a p/n junction and including a top p-type group III-nitride
layer (28), and a p-contact (30, 30, 30") for flip-chip bonding
the top p-type group III-nitride layer. The p-contact includes an aluminum layer
(32) disposed on the top p-type group III-nitride layer (28), and
an interface layer (40, 66, 72, 80) disposed between the aluminum layer
and the top p-type group III-nitride layer. The interface layer reduces a contact
resistance between the aluminum layer (32) and the top p-type group III-nitride
layer (28). The interface layer comprises one or more group III-nitride layers.