Structures and methods for DEAPROM memory with low tunnel barrier intergate
insulators are provided. The DEAPROM memory includes a first source/drain region
and a second source/drain region separated by a channel region in a substrate.
A floating gate opposes the channel region and is separated therefrom by a gate
oxide. A control gate opposes the floating gate. The control gate is separated
from the floating gate by a low tunnel barrier intergate insulator having a tunnel
barrier of less than 1.5 eV. The low tunnel barrier intergate insulator includes
a metal oxide insulator selected from the group consisting of NiO, Al2O3,
Ta2O5, TiO2, ZrO2, Nb2O5,
Y2O3, Gd2O3, SrBi2Ta2O3,
SrTiO3, PbTiO3, and PbZrO3. The floating gate
includes a polysilicon floating gate having a metal layer formed thereon in contact
with the low tunnel barrier intergate insulator. And, the control gate includes
a polysilicon control gate having a metal layer formed thereon in contact with
the low tunnel barrier intergate insulator.