The present invention provides for an improved electromagnetic radiation detector
having a micromachined electrostatic chopper/shutter device. The MEMS flexible
film chopper/shutter device provides reliability, efficiency, noise reduction and
temperature fluctuation compensation capabilities to the associated electromagnetic
radiation detector. An electromagnetic radiation detector having an electrostatic
chopper/shutter device includes a detector material element and flexible film actuator
overlying the detector material layer and moveable relative thereto. The flexible
film actuator will typically include an electrode element and a biasing element
such that the actuator remains in a fully curled, open state absent electrostatic
voltage and moves to a fully uncurled, closed state upon the application of electrostatic
voltage. Arrays that incorporate a plurality of electromagnetic radiation detectors
and/or electrostatic shuttering devices are additionally provided for.