A development apparatus for discharging a developer onto a surface of a semiconductor
substrate (15) comprises a nozzle pipe (13) for supplying the developer,
and a nozzle (14) having a shape of a spoon with a taper and discharging
the developer supplied by the nozzle pipe onto the surface of the substrate. The
nozzle sprays the developer onto the surface of the substrate at any spray angle
under a low and constant pressure.