A dipole ion source (FIG. 1) includes two cathode surfaces, a substrate
(1) and a pole (3); wherein a gap is defined between the substrate
and the pole; an unsymmetrical mirror magnetic field including a compressed end,
wherein the substrate is positioned in the less compressed end of the magnetic
field; and an anode (4) creating an electric field penetrating the magnetic
field and confining electrons in a continuous Hall current loop, wherein the unsymmetrical
magnetic field serves an ion beam on the substrate.