An optical waveguide having low polarization dependence having a lower clad layer formed on a substrate, a core layer formed on the lower clad layer and an upper clad layer in which the core layer is buried. The core layer and the upper clad layer of the optical waveguide are made of a material comprising glass as a major component. The polarization dependence is lowered by optimizing the relationship between the coefficients of linear expansion softening temperatures of the optical waveguide layers.