A method for dicing semiconductor chips and a corresponding semiconductor chip
system are described. The met-hod includes the steps: provision of a substrate
having an upper substrate level, a middle substrate level and a lower substrate
level; a plurality of empty spaces or porous areas being provided in the middle
substrate level, the empty spaces or porous areas being enclosed by a substrate
frame area; the empty spaces or porous areas being situated under a particular
semiconductor chip area which is delimited by a semiconductor chip peripheral area
in such a way that a particular substrate frame area is distanced from a vertical
extension of the particular corresponding semiconductor peripheral area by a lateral
intermediate space. In the case of the empty spaces, at least one substrate support
element is provided to bond the lower substrate level to a particular semiconductor
chip area in the upper substrate level. A lateral separation of the semiconductor
chip areas is produced by severing the upper substrate level above the particular
intermediate space along the particular semiconductor chip peripheral area. The
semiconductor chip areas are diced into semiconductor chips by severing the particular
substrate support elements.