This invention relates to a new improved method and structure in the fabricating
of aluminum metal pads. The formation special aluminum bond pad metal structures
are described which improve adhesion between the tantalum nitride pad barrier layer
and the underlying copper pad metallurgy by a special interlocking bond pad structure.
It is the object of the present invention to provide a process wherein a special
grid of interlocking via structures is placed in between the underlying copper
pad metal and the top tantalum nitride pad barrier layer providing improved adhesion
to the aluminum pad metal stack structure. This unique contact bond pad structure
provides for thermal stress relief, improved wire bond adhesion to the aluminum
pad, and prevents peeling during wire bond adhesion tests.