To provide a polishing composition whereby the stock removal rate of a
silicon nitride layer is higher than the stock removal rate of a silicon
oxide layer, there is substantially no adverse effect against polishing
planarization, and a sufficient stock removal rate of a silicon nitride
layer is obtainable, and a polishing method employing such a composition.
A polishing composition which comprises silicon oxide abrasive grains, an
acidic additive and water, wherein the acidic additive is such that when
it is formed into a 85 wt % aqueous solution, the chemical etching rate
of the silicon nitride layer is at most 0.1 nm/hr in an atmosphere of
80.degree. C. Particularly preferred is one wherein the silicon oxide
abrasive grains have an average particle size of from 1 to 50 nm, and the
pH of the composition is from 3.5 to 6.5.