A compliant contact structure and contactor card for operably coupling with a
semiconductor
device to be tested includes a substantially planar substrate with a compliant
contact formed therein. The compliant contact structure includes a portion fixed
within the substrate and at least another portion integral with the fixed portion,
laterally unsupported within a thickness of the substrate and extending beyond
a side thereof. Dual-sided compliant contact structures, methods of forming compliant
contact structures, a method of testing a semiconductor device and a testing system
are also disclosed.