The present invention relates to a method for producing a vertical transistor,
and to a vertical transistor. A sacrificial gate oxide and a sacrificial gate electrode
are used during the production of the vertical transistor to makes it possible
to considerably reduce or entirely avoid negative effects that normally result
from the production of insulation structures between the vertical transistors.
In particular, broadening of the gate oxide at the edge of the gate electrode can
be prevented, and the edge of the gate electrode can be influenced deliberately.
This allows vertical transistors to be produced having a current/voltage characteristic
that can be adjusted specifically. In particular, vertical transistors can be produced
having a pronounced corner effect.