A balanced positioning apparatus comprises a balance mass which is supported
so
as to be moveable in the three degrees of freedom, such as X and Y translation
and rotation about the Z-axis. Drive forces in these degrees of freedom act directly
between the positioning body and the balance mass. Reaction forces arising from
positioning movements result in corresponding movement of the balance mass and
all reaction force are kept within the balanced positioning system. The balance
mass may be a rectangular balance frame having the stators of two linear motors
forming the uprights of an H-drive mounted on opposite sides. The cross-piece of
the H-drive spans the frame and the positioned object is positioned within the
central opening of the frame.