A polymeric compound for photoresist of the present invention includes a monomer
unit having 2,6-dioxabicyclo[3.3.0]octane skeleton in the structure. The monomer
unit having 2,6-dioxabicyclo[3.3.0]octane skeleton includes a monomer unit represented
by the following Formula (I):
##STR1##
wherein R is a hydrogen atom or a methyl group. The polymeric compound for
photoresist may include a monomer unit having 2,6-dioxabicyclo[3.3.0]octane skeleton,
a monomer unit having a group of adhesion to substrate, and a monomer unit having
an acid-eliminating group. The polymeric compound for photoresist of the present
invention exhibits not only adhesion to substrate, acid-eliminating property and
resistance to dry-etching but also has well-balanced solubility in solvents for
photoresist and alkali-soluble property.