A method for manufacturing a GaN-based light-emitting diode (LED) is provided
with
the following steps of: providing a substrate; forming a GaN semiconductor epitaxy
layer on the substrate, the GaN semiconductor epitaxy layer further including an
n-type GaN contact layer, a light-emitting layer and a p-type GaN contact layer;
forming a digital penetration layer on the p-type GaN contact layer; using a multi-step
dry etching method to etch the digital penetration layer, the p-type GaN contact
layer, the light-emitting layer to form an n-metal forming area, etching terminating
at the light-emitting layer; forming a first ohmic contact electrode on the digital
penetration layer for a p-type ohmic contact layer and a second ohmic contact electrode
on the n-metal forming area for an n-type ohmic contact layer; and finally, forming
pads on both first and second ohmic contact electrodes.