The present invention relates to an anti-reflective coating composition characterized
by comprising a resin made from triazine compounds having at least two nitrogen
atoms substituted a hydroxymethyl group and/or an alkoxymethyl group, and a light
absorbing compound and/or a light absorbing resin. The present invention offers
an anti-reflective coating composition for the anti-reflective coating having high
light absorption property of the light used for the lithography process in the
preparation of semiconductor device, showing high reflective light preventing effect,
being used at thinner film thickness more than before, and having greater dry etching
rate in comparison to photoresist layer.