A storage/buffering system for the stocking and/or buffering of substrate and/or
substrate carriers in a process environment includes a 6-axis robot. An end-effector
is connected with the robot providing an additional one degree of freedom and a
mechanism for grabbing and moving of substrate and/or substrate carriers. The robot
is mounted in an inverted orientation to a removable service cart for easy removal
of the robot to a service area in the event of breakdown. The robot receives commands
from a programmable controller connected to control the robot and configured to
direct the arm of the robot through a set of movements. Product is loaded in and
out of the system through I/O load ports. Product is stored inside the storage/buffering
system on a plurality of storage locations, each with product presence/absence
detect sensor. The robot can alternatively be mounted directly to the storage system
enclosure structure.