An electrolytic processing apparatus has at least one processing electrode
(86) and at least feeding electrode (86) disposed on the same side as the
processing electrode (86) with respect to a substrate (W). An organic
compound having an ion exchange group is chemically bonded to at least
one of a surface of the processing electrode (86) and a surface of the
feeding electrode (86b) to form an ion exchanger (90). The electrolytic
processing apparatus also has a substrate holder (42) for holding the
substrate (W) and bringing the substrate (W) into contact with or close
to the processing electrode (86). The electrolytic processing apparatus
includes a power supply (48) for applying a voltage between the
processing electrode (86) and the feeding electrode (86), and a fluid
supply unit (92, 94) for supplying a fluid between the substrate (W) and
the processing electrode (86).