In a measuring apparatus for a semiconductor multiple layer structure, a spectrometer
disperses light from a sample for measurement of the photoluminescence spectrum
or disperses probe light to irradiate the sample for the measurement of the reflection
spectrum. A controller makes a guide member guide the white light to the spectrometer
and acquire electric signals from a first detector for the measurement of the reflection
spectrum, and makes the guide member guide the light from the spectrometer to a
second detector to acquire electric signals for the measurement of the photoluminescence spectrum.