A vacuum conduit connected to a vacuum pump has a shield surface which absorbs
radiation to reduce the total radiation falling on the vacuum pump. The vacuum
system includes the vacuum conduit connected between a process chamber and the
vacuum pump and a surface treatment along at least a portion of the shield surface
adapted to absorb radiation. Since the treatment is on the interior surface of
the vacuum conduit and does not extend into the center of the conduit, gaseous
flow to the pump is not impeded. In this manner radiation entering the vacuum pump
and falling on the cryogenic array is reduced without impeding gaseous flow to
the cryogenic surface. The system therefore minimizes the radiation load on the
cryogenic array in the vacuum pump without impeding the gaseous flow through the
vacuum pump.