A memory array dual-trench isolation structure and a method for forming the same
have been provided. The method comprises: forming a p-doped silicon (p-Si) substrate;
forming an n-doped (n+) Si layer overlying the p-Si substrate; prior to forming
the n+ Si bit lines, forming a p+ Si layer overlying the n+ Si layer; forming a
layer of silicon nitride overlying the p+ layer; forming a top oxide layer overlying
the silicon nitride layer; performing a first selective etch of the top oxide layer,
the silicon nitride layer, the p+ Si layer, and a portion of the n+ Si layer, to
form n+ Si bit lines and bit line trenches between the bit lines; forming an array
of metal bottom electrodes overlying a plurality of n-doped silicon (n+ Si) bit
lines, with intervening p-doped (p+) Si areas; forming a plurality of word line
oxide isolation structures orthogonal to and overlying the n+ Si bit lines, adjacent
to the bottom electrodes, and separating the p+ Si areas; forming a plurality of
top electrode word lines, orthogonal to the n+ Si bit lines, with an interposing
memory resistor material overlying the bottom electrodes; and, forming oxide-filled
word line trenches adjacent the word lines.