The present invention provides new high resolution nanocomposite resists
applicable to next generation lithographies, methods of making these
novel resists, and methods of using these new resists in lithographic
processes to effect state-of-the-art lithographies. New nanocomposite
negative resists comprising a photoacid generating component, a styrene
component, and an optional polyhedral oligosilsequioxane component are
provided. Negative resists of this invention may also contain an optional
methacrylate component. This invention and the embodiments described
herein constitute fundamentally new architectures for high resolution
resists.