According to one exemplary embodiment, a bipolar transistor comprises a
base having a top surface. The bipolar transistor further comprises a sacrificial
post which, in one exemplary embodiment, is situated between first and second link
spacers. The bipolar transistor also comprises a conformal layer situated over
the sacrificial post. The conformal layer may comprise silicon oxide, for example.
According to this exemplary embodiment, the bipolar transistor further comprises
a sacrificial planarizing layer situated over the conformal layer, the sacrificial
post, and the base. The sacrificial planarizing layer has a first thickness in
a first region between the first and second link spacers and a second thickness
in a second region outside of the first and second link spacers, where the second
thickness is generally greater than the first thickness. Another embodiment is
a method that achieves the above-described bipolar transistor.