A semiconductor integrated circuit device is provided on a semiconductor substrate,
and includes a plurality of word lines, a plurality of data lines, and a plurality
of electrically programmable and erasable non-volatile memory cells respectively
coupled to the plurality of word lines and to the plurality of data lines. The
erasable non-volatile memory cell each includes a MIS transistor having a floating
gate having a first level polycrystalline silicon layer, a source, and a drain
coupled to the corresponding data line, and a control gate formed of a semiconductor
region in the semiconductor substrate, the control gate being coupled to the corresponding
word line.