A structure for the n-type contact layer in the GaN-based MQW LEDs is provided.
Instead of using Si-doped GaN as commonly found in conventional GaN-based MQW LEDs,
the n-type contact layer provided by the present invention achieves high doping
density (11019 cm-3) and low resistivity through
a superlattice structure combining two types of materials, AlmInnGa1-m-nN
and AlpInqGa1-p-qN (0m,n1, 0p,q1,
p+q1, mp), each having its specific composition and doping density.
In addition, by controlling the composition of Al, In, and Ga in the two materials,
the n-type contact layer would have a compatible lattice constant with the substrate
and the epitaxial structure of the GaN-based MQW LEDs. This n-type contact layer,
therefore, would not chap from the heavy Si doping, have a superior quality, and
reduce the difficulties of forming n-type ohmic contact electrode. In turn, the
GaN-based MQW LEDs would require a lower operation voltage.