A sample analyzer such as a Rutherford backscattering spectrometer for detecting
ions that are elastically scattered by a sample is provided. A spectrum-measuring
unit is shifted so that it can be positioned in accordance with a plurality of
the scattering directions of the scattered ions in the sample analyzer. For example,
the spectrum-measuring unit is shifted in an arc about the irradiation point of
the ion beams along a guide rail. Alternatively, a vacuum container is composed
of a fixed container holding the sample therein and a movable container hermitically
and slidably connected to the fixed container and provided with detection ports.
The movable container slides and thus the detection ports are shifted so that the
detection ports can be positioned in accordance with the scattering directions.
Accordingly, the detection ports, in turn, detection angles are easily changed,
whereby a large sample can be analyzed.